IP Library Granted Patent US 4,966,813
Granted Patent Utility
US 4,966,813 · App. 07/216,955

Reflection-preventive pellicle film

Inventors: Tokinori Agou, Hitomi Matsuzaki, Masahide Tanaka, Takamasa Tsumoto, Masaaki Kawasaki, Takami Nishikawa, Shuji Minami
Patented Case View Patent ↗
Granted: Oct 30, 1990 Filed: Jul 11, 1988
Inventors
Tokinori Agou
Hitomi Matsuzaki
Masahide Tanaka
Takamasa Tsumoto
Masaaki Kawasaki
Takami Nishikawa
Shuji Minami
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.

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Quick Facts
Patent No.
US 4,966,813
App. No.
07/216,955
Filed
1988-07-11
Granted
1990-10-30
Kind
A