Granted Patent
Utility
US 4,996,106 · App. 07/267,380
Pellicle
Inventors:
Hiroaki Nakagawa, Hitomi Matsuzaki
Patented Case
View Patent ↗
Granted: Feb 26, 1991
Filed: Nov 4, 1988
Inventors
Hiroaki Nakagawa
Hitomi Matsuzaki
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.