IP Library › Granted Patent US 5,003,183
Granted Patent Utility
US 5,003,183 · App. 07/520,728

Ion implantation apparatus and method of controlling the same

Inventors: Mamoru Nogami, Nobuo Nagai
Patented Case View Patent ↗
Granted: Mar 26, 1991 Filed: May 9, 1990
Inventors
Mamoru Nogami
Nobuo Nagai
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 5,003,183
App. No.
07/520,728
Filed
1990-05-09
Granted
1991-03-26
Kind
A