IP Library › Granted Patent US 5,003,615
Granted Patent Utility
US 5,003,615 · App. 07/278,400

Optoelectronic system for determining surface irregularities of a workpiece having a nominally plane reflective surface

Inventor: Peter Seitz
Patented Case View Patent ↗
Granted: Mar 26, 1991 Filed: Dec 1, 1988
Inventor
Peter Seitz
Assignee (at issue)
Harris Semiconductor Patents, Inc.

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Quick Facts
Patent No.
US 5,003,615
App. No.
07/278,400
Filed
1988-12-01
Granted
1991-03-26
Kind
A