IP Library › Granted Patent US 5,013,691
Granted Patent Utility
US 5,013,691 · App. 07/386,650

Anisotropic deposition of silicon dioxide

Inventors: Earl R. Lory, Leonard J. Olmer
Patented Case View Patent ↗
Granted: May 7, 1991 Filed: Jul 31, 1989
Inventors
Earl R. Lory
Leonard J. Olmer
Assignee (at issue)
AT&T Bell Laboratories

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Quick Facts
Patent No.
US 5,013,691
App. No.
07/386,650
Filed
1989-07-31
Granted
1991-05-07
Kind
A