IP Library › Granted Patent US 5,028,564
Granted Patent Utility
US 5,028,564 · App. 07/352,583

Edge doping processes for mesa structures in SOS and SOI devices

Inventors: Chen-Chi P. Chang, Kuan-Yang Liao, Joseph E. Farb
Patented Case View Patent ↗
Granted: Jul 2, 1991 Filed: Apr 27, 1989
Inventors
Chen-Chi P. Chang
Kuan-Yang Liao
Joseph E. Farb

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Quick Facts
Patent No.
US 5,028,564
App. No.
07/352,583
Filed
1989-04-27
Granted
1991-07-02
Kind
A