Granted Patent
Utility
US 5,037,876 · App. 07/504,931
Planarizing dielectric
Inventors:
Siegfried Birkle, Albert Hammerschmidt, Johann Kammermaier, Rainer Leuschner, Rolf Schulte
Patented Case
View Patent ↗
Granted: Aug 6, 1991
Filed: Apr 5, 1990
Inventors
Siegfried Birkle
Albert Hammerschmidt
Johann Kammermaier
Rainer Leuschner
Rolf Schulte
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.