IP Library › Granted Patent US 5,046,148
Granted Patent Utility
US 5,046,148 · App. 07/522,786

Ion implantation apparatus

Inventors: Mamoru Nogami, Nobuo Nagai
Patented Case View Patent ↗
Granted: Sep 3, 1991 Filed: May 14, 1990
Inventors
Mamoru Nogami
Nobuo Nagai
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.

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Quick Facts
Patent No.
US 5,046,148
App. No.
07/522,786
Filed
1990-05-14
Granted
1991-09-03
Kind
A