IP Library › Granted Patent US 5,053,354
Granted Patent Utility
US 5,053,354 · App. 07/535,440

Method of fabricating a reverse staggered type silicon thin film transistor

Inventors: Sakae Tanaka, Yoshiaki Watanabe, Katsuo Shirai, Yoshihisa Ogiwara
Patented Case View Patent ↗
Granted: Oct 1, 1991 Filed: Jun 8, 1990
Inventors
Sakae Tanaka
Yoshiaki Watanabe
Katsuo Shirai
Yoshihisa Ogiwara
Assignees (at issue)
Seikosha Co., Ltd.
Nippon Precision Circuits Inc.

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Quick Facts
Patent No.
US 5,053,354
App. No.
07/535,440
Filed
1990-06-08
Granted
1991-10-01
Kind
A