Granted Patent
Utility
US 5,055,964 · App. 07/579,439
Electrostatic chuck having tapered electrodes
Inventors:
Joseph S. Logan, Raymond R. Ruckel, Robert E. Tompkins, Robert P. Westerfield, Jr.
Patented Case
View Patent ↗
Granted: Oct 8, 1991
Filed: Sep 7, 1990
Inventors
Joseph S. Logan
Raymond R. Ruckel
Robert E. Tompkins
Robert P. Westerfield, Jr.
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.