IP Library › Granted Patent US 5,059,451
Granted Patent Utility
US 5,059,451 · App. 07/544,699

Reflection-preventive pellicle film and process for preparation thereof

Inventors: Tokinori Agou, Hitomi Matsuzaki, Masaaki Kawasaki
Patented Case View Patent ↗
Granted: Oct 22, 1991 Filed: Jun 27, 1990
Inventors
Tokinori Agou
Hitomi Matsuzaki
Masaaki Kawasaki
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.

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Quick Facts
Patent No.
US 5,059,451
App. No.
07/544,699
Filed
1990-06-27
Granted
1991-10-22
Kind
A