Granted Patent
Utility
US 5,068,539 · App. 07/522,788
Ion implantation apparatus
Inventors:
Mamoru Nogami, Kazuhiro Nishikawa
Patented Case
View Patent ↗
Granted: Nov 26, 1991
Filed: May 14, 1990
Inventors
Mamoru Nogami
Kazuhiro Nishikawa
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.