Granted Patent
Utility
US 5,069,996 · App. 07/408,849
Process for developing selected positive photoresists
Inventor:
Robert F. Rogler
Patented Case
View Patent ↗
Granted: Dec 3, 1991
Filed: Sep 18, 1989
Inventor
Robert F. Rogler
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.