Granted Patent
Utility
US 5,071,485 · App. 07/580,928
Method for photoresist stripping using reverse flow
Inventors:
John C. Matthews, Robert D. Wooten, David S. Ferris, Stuart Rounds
Patented Case
View Patent ↗
Granted: Dec 10, 1991
Filed: Sep 11, 1990
Inventors
John C. Matthews
Robert D. Wooten
David S. Ferris
Stuart Rounds
Assignee (at issue)
Fusion Systems Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.