Granted Patent
Utility
US 5,081,069 · App. 07/457,113
Method for depositing a Tio.sub.2 layer using a periodic and simultaneous tilting and rotating platform motion
Inventors:
Sidney G. Parker, Jerry Wood, Robert T. Turner, Craig A. Fischer
Patented Case
View Patent ↗
Granted: Jan 14, 1992
Filed: Dec 26, 1989
Inventors
Sidney G. Parker
Jerry Wood
Robert T. Turner
Craig A. Fischer
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.