Granted Patent
Utility
US 5,085,558 · App. 07/577,209
Wafer handling system
Inventor:
Orest Engelbrecht
Patented Case
View Patent ↗
Granted: Feb 4, 1992
Filed: Sep 4, 1990
Inventor
Orest Engelbrecht
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.