IP Library › Granted Patent US 5,087,176
Granted Patent Utility
US 5,087,176 · App. 06/684,241

Method and apparatus to provide thermal isolation of process gas bearings

Inventor: Kurt H. Wieland
Patented Case View Patent ↗
Granted: Feb 11, 1992 Filed: Dec 20, 1984
Inventor
Kurt H. Wieland
Assignee (at issue)
AlliedSignal, Inc.

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Quick Facts
Patent No.
US 5,087,176
App. No.
06/684,241
Filed
1984-12-20
Granted
1992-02-11
Kind
A