Granted Patent
Utility
US 5,087,478 · App. 07/388,229
Deposition method and apparatus using plasma discharge
Inventor:
Weldon S. Williamson
Patented Case
View Patent ↗
Granted: Feb 11, 1992
Filed: Aug 1, 1989
Inventor
Weldon S. Williamson
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.