Granted Patent
Utility
US 5,091,217 · App. 07/587,737
Method for processing wafers in a multi station common chamber reactor
Inventors:
H. Peter W. Hey, William A. Mazak, Ravinder Aggarwal, John H. Curtin, Paul B. Brown, Joe R. Smith
Patented Case
View Patent ↗
Granted: Feb 25, 1992
Filed: Sep 25, 1990
Inventors
H. Peter W. Hey
William A. Mazak
Ravinder Aggarwal
John H. Curtin
Paul B. Brown
Joe R. Smith
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.