Granted Patent
Utility
US 5,099,571 · App. 07/695,465
Method for fabricating a split-ring electrostatic chuck
Inventors:
Joseph S. Logan, Raymond R. Ruckel, Robert E. Tompkins, Robert P. Westerfield, Jr.
Patented Case
View Patent ↗
Granted: Mar 31, 1992
Filed: May 3, 1991
Inventors
Joseph S. Logan
Raymond R. Ruckel
Robert E. Tompkins
Robert P. Westerfield, Jr.
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.