IP Library Granted Patent US 5,111,261
Granted Patent Utility
US 5,111,261 · App. 07/564,814

Silicon thin film transistor with an intrinsic silicon active layer formed within the boundary defined by the edges of the gate electrode and the impurity containing silicon layer

Inventors: Sakae Tanaka, Yoshiaki Watanabe, Katsuo Shirai, Yoshihisa Ogiwara
Patented Case View Patent ↗
Granted: May 5, 1992 Filed: Aug 8, 1990
Inventors
Sakae Tanaka
Yoshiaki Watanabe
Katsuo Shirai
Yoshihisa Ogiwara
Assignees (at issue)
Seikosha Co., Ltd.
Nippon Precision Circuits Inc.

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Quick Facts
Patent No.
US 5,111,261
App. No.
07/564,814
Filed
1990-08-08
Granted
1992-05-05
Kind
A