Granted Patent
Utility
US 5,119,540 · App. 07/558,196
Apparatus for eliminating residual nitrogen contamination in epitaxial layers of silicon carbide and resulting product
Inventors:
Hua-Shuang Kong, Thomas G. Coleman, Calvin H. Carter, Jr.
Patented Case
View Patent ↗
Granted: Jun 9, 1992
Filed: Jul 24, 1990
Inventors
Hua-Shuang Kong
Thomas G. Coleman
Calvin H. Carter, Jr.
Assignee (at issue)
Cree Research Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.