Granted Patent
Utility
US 5,119,541 · App. 07/391,556
Wafer succeptor apparatus
Inventors:
Tadahiro Ohmi, Masaru Umeda
Patented Case
View Patent ↗
Granted: Jun 9, 1992
Filed: Jul 25, 1989
Inventors
Tadahiro Ohmi
Masaru Umeda
Assignee (at issue)
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.