Granted Patent
Utility
US 5,126,178 · App. 07/654,962
Wafer processing film
Inventors:
Yasuo Takemura, Osamu Narimatsu, Kazuyoshi Komatsu, Yoko Takeuchi
Patented Case
View Patent ↗
Granted: Jun 30, 1992
Filed: Feb 14, 1991
Inventors
Yasuo Takemura
Osamu Narimatsu
Kazuyoshi Komatsu
Yoko Takeuchi
Assignee (at issue)
Misui Toatsu Chemicals
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.