Granted Patent
Utility
US 5,130,547 · App. 07/616,870
Charged-particle beam exposure method and apparatus
Inventors:
Kiichi Sakamoto, Yoshihisa Oae, Shunsuke Fueki, Akio Yamada, Hiroshi Yasuda
Patented Case
View Patent ↗
Granted: Jul 14, 1992
Filed: Nov 21, 1990
Inventors
Kiichi Sakamoto
Yoshihisa Oae
Shunsuke Fueki
Akio Yamada
Hiroshi Yasuda
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.