IP Library › Granted Patent US 5,132,354
Granted Patent Utility
US 5,132,354 · App. 07/538,744

Silicon nitride precursor polymer

Inventor: Dru L. DeLaet
Patented Case View Patent ↗
Granted: Jul 21, 1992 Filed: Jun 15, 1990
Inventor
Dru L. DeLaet
Assignee (at issue)
Ethyl Corporation

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Quick Facts
Patent No.
US 5,132,354
App. No.
07/538,744
Filed
1990-06-15
Granted
1992-07-21
Kind
A