Granted Patent
Utility
US 5,156,727 · App. 07/596,853
Film thickness uniformity control apparatus for in-line sputtering systems
Inventors:
Erik J. Bjornard, Michael J. Valiska, Clifford L. Taylor
Patented Case
View Patent ↗
Granted: Oct 20, 1992
Filed: Oct 12, 1990
Inventors
Erik J. Bjornard
Michael J. Valiska
Clifford L. Taylor
Assignee (at issue)
Viratec Thin Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.