IP Library › Granted Patent US 5,157,001
Granted Patent Utility
US 5,157,001 · App. 07/583,185

Method of dicing semiconductor wafer along protective film formed on scribe lines

Inventor: Masahiro Sakuma
Patented Case View Patent ↗
Granted: Oct 20, 1992 Filed: Sep 14, 1990
Inventor
Masahiro Sakuma
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 5,157,001
App. No.
07/583,185
Filed
1990-09-14
Granted
1992-10-20
Kind
A