Granted Patent
Utility
US 5,168,030 · App. 07/742,513
Positive type o-quinone diazide photo-resist containing antistatic agent selected from hydrazones, ethylcarbazole and bis(dimethylamino)benzene
Inventors:
Konoe Miura, Tameichi Ochiai, Yasuhiro Kameyama, Tooru Koyama, Takashi Okabe, Tomoharu Mametani
Patented Case
View Patent ↗
Granted: Dec 1, 1992
Filed: Aug 5, 1991
Inventors
Konoe Miura
Tameichi Ochiai
Yasuhiro Kameyama
Tooru Koyama
Takashi Okabe
Tomoharu Mametani
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
Mitsubishi Kasei Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.