IP Library Granted Patent US 5,169,573
Granted Patent Utility
US 5,169,573 · App. 07/651,950

Method of forming three-dimensional pattern

Inventors: Katsunori TSUCHIDA, Yasuo Watanabe, Yasuyuki Suzuki
Patented Case View Patent ↗
Granted: Dec 8, 1992 Filed: Feb 7, 1991
Inventors
Katsunori TSUCHIDA
Yasuo Watanabe
Yasuyuki Suzuki
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.

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Quick Facts
Patent No.
US 5,169,573
App. No.
07/651,950
Filed
1991-02-07
Granted
1992-12-08
Kind
A