Granted Patent
Utility
US 5,180,467 · App. 07/565,621
Etching system having simplified diffuser element removal
Inventors:
Roger Cook, Daniel V. Milina
Patented Case
View Patent ↗
Granted: Jan 19, 1993
Filed: Aug 10, 1990
Inventors
Roger Cook
Daniel V. Milina
Assignee (at issue)
VLSI Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.