Granted Patent
Utility
US 5,180,918 · App. 07/700,451
Method and apparatus for measuring ion beam collimation, shaping the ion beam and controlling scanning thereof
Inventor:
Michiro Isobe
Patented Case
View Patent ↗
Granted: Jan 19, 1993
Filed: May 15, 1991
Inventor
Michiro Isobe
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.