Granted Patent
Utility
US 5,182,234 · App. 07/737,560
Profile tailored trench etch using a SF.sub.6 -O.sub.2 etching composition wherein both isotropic and anisotropic etching is achieved by varying the amount of oxygen
Inventor:
Theodore O. Meyer
Patented Case
View Patent ↗
Granted: Jan 26, 1993
Filed: Jul 26, 1991
Inventor
Theodore O. Meyer
Assignee (at issue)
Advanced Power Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.