Granted Patent
Utility
US 5,183,699 · App. 07/667,402
Wafer processing films
Inventors:
Yasuo Takemura, Osamu Narimatsu, Kazuyoshi Komatsu
Patented Case
View Patent ↗
Granted: Feb 2, 1993
Filed: Apr 1, 1991
Inventors
Yasuo Takemura
Osamu Narimatsu
Kazuyoshi Komatsu
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.