IP Library › Granted Patent US 5,186,786
Granted Patent Utility
US 5,186,786 · App. 07/732,192

Method for determining the complete elimination of a thin layer on a non planar substrate

Inventors: Jean Galvier, Philippe Gayet, Annie Tissier
Patented Case View Patent ↗
Granted: Feb 16, 1993 Filed: Jul 19, 1991
Inventors
Jean Galvier
Philippe Gayet
Annie Tissier
Assignee (at issue)
France Telecom/CNET

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Quick Facts
Patent No.
US 5,186,786
App. No.
07/732,192
Filed
1991-07-19
Granted
1993-02-16
Kind
A