IP Library › Granted Patent US 5,187,300
Granted Patent Utility
US 5,187,300 · App. 07/764,566

Volatile precursors for copper CVD

Inventor: John Anthony Thomas Norman
Patented Case View Patent ↗
Granted: Feb 16, 1993 Filed: Sep 20, 1991
Inventor
John Anthony Thomas Norman
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 5,187,300
App. No.
07/764,566
Filed
1991-09-20
Granted
1993-02-16
Kind
A