Granted Patent
Utility
US 5,187,729 · App. 07/838,046
"Method and apparatus for detecting a crystallographic axis of a single crystal ingot for ""OF"" determination"
Inventors:
Hiroyaki Ibe, Seiichi Terashima, Tsumoru Masui
Patented Case
View Patent ↗
Granted: Feb 16, 1993
Filed: Feb 19, 1992
Inventors
Hiroyaki Ibe
Seiichi Terashima
Tsumoru Masui
Assignee (at issue)
SHIN-ETSU HANDOTAI CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.