Granted Patent
Utility
US 5,194,398 · App. 07/830,967
Semiconductor film and process for its production
Inventors:
Kenji Miyachi, Nobuhiro Fukuda, Yoshinori Ashida, Masato Koyama
Patented Case
View Patent ↗
Granted: Mar 16, 1993
Filed: Feb 6, 1992
Inventors
Kenji Miyachi
Nobuhiro Fukuda
Yoshinori Ashida
Masato Koyama
Assignee (at issue)
Mitsui Toatsu Chemicals, Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.