IP Library › Granted Patent US 5,198,390
Granted Patent Utility
US 5,198,390 · App. 07/821,944

RIE process for fabricating submicron, silicon electromechanical structures

Inventors: Noel C. MacDonald, Zuoying L. Zhang
Patented Case View Patent ↗
Granted: Mar 30, 1993 Filed: Jan 16, 1992
Inventors
Noel C. MacDonald
Zuoying L. Zhang
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 5,198,390
App. No.
07/821,944
Filed
1992-01-16
Granted
1993-03-30
Kind
A