IP Library Granted Patent US 5,200,049
Granted Patent Utility
US 5,200,049 · App. 07/737,372

Cantilever mount for rotating cylindrical magnetrons

Inventors: David E. Stevenson, Erik J. Bjornard, Geoffrey H. Humberstone
Patented Case View Patent ↗
Granted: Apr 6, 1993 Filed: Jul 29, 1991
Inventors
David E. Stevenson
Erik J. Bjornard
Geoffrey H. Humberstone
Assignee (at issue)
Viratec Thin Films, Inc.

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Quick Facts
Patent No.
US 5,200,049
App. No.
07/737,372
Filed
1991-07-29
Granted
1993-04-06
Kind
A