Granted Patent
Utility
US 5,204,286 · App. 07/775,744
Method of making self-aligned contacts and vertical interconnects to integrated circuits
Inventor:
Trung T. Doan
Patented Case
View Patent ↗
Granted: Apr 20, 1993
Filed: Oct 15, 1991
Inventor
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.