Granted Patent
Utility
US 5,207,437 · App. 07/784,291
Ceramic electrostatic wafer chuck
Inventors:
Michael Barnes, Dennis K. Coultas, John C. Forster, John H. Keller
Patented Case
View Patent ↗
Granted: May 4, 1993
Filed: Oct 29, 1991
Inventors
Michael Barnes
Dennis K. Coultas
John C. Forster
John H. Keller
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.