Granted Patent
Utility
US 5,209,182 · App. 07/875,424
Chemical vapor deposition apparatus for forming thin film
Inventors:
Tomohiro Ohta, Eiichi Kondoh, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi
Patented Case
View Patent ↗
Granted: May 11, 1993
Filed: Apr 29, 1992
Inventors
Tomohiro Ohta
Eiichi Kondoh
Tohru Mitomo
Kenichi Otsuka
Hiroshi Sekihashi
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.