Granted Patent
Utility
US 5,210,053 · App. 07/846,083
Method for fabricating semiconductor device
Inventor:
Yasushi Yamagata
Patented Case
View Patent ↗
Granted: May 11, 1993
Filed: Mar 5, 1992
Inventor
Yasushi Yamagata
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.