IP Library Granted Patent US 5,212,593
Granted Patent Utility
US 5,212,593 · App. 07/831,818

Broad band optical reduction system using matched multiple refractive element materials

Inventors: David M. Williamson, Satish Desai
Patented Case View Patent ↗
Granted: May 18, 1993 Filed: Feb 6, 1992
Inventors
David M. Williamson
Satish Desai
Assignee (at issue)
SVG Lithography Systems, Inc.

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Quick Facts
Patent No.
US 5,212,593
App. No.
07/831,818
Filed
1992-02-06
Granted
1993-05-18
Kind
A