IP Library Granted Patent US 5,223,452
Granted Patent Utility
US 5,223,452 · App. 07/784,614

Method and apparatus for doping silicon spheres

Inventor: Vernon E. Knepprath
Patented Case View Patent ↗
Granted: Jun 29, 1993 Filed: Oct 29, 1991
Inventor
Vernon E. Knepprath

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Quick Facts
Patent No.
US 5,223,452
App. No.
07/784,614
Filed
1991-10-29
Granted
1993-06-29
Kind
A