IP Library › Granted Patent US 5,242,770
Granted Patent Utility
US 5,242,770 · App. 07/821,793

Mask for photolithography

Inventors: Jang Fung Chen, James A. Matthews
Patented Case View Patent ↗
Granted: Sep 7, 1993 Filed: Jan 16, 1992
Inventors
Jang Fung Chen
James A. Matthews
Assignee (at issue)
MicroUnity Systems Engineering, Inc.

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Quick Facts
Patent No.
US 5,242,770
App. No.
07/821,793
Filed
1992-01-16
Granted
1993-09-07
Kind
A