Granted Patent
Utility
US 5,247,954 · App. 07/791,094
Megasonic cleaning system
Inventors:
Robert W. Grant, Richard Novak
Patented Case
View Patent ↗
Granted: Sep 28, 1993
Filed: Nov 12, 1991
Inventors
Robert W. Grant
Richard Novak
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.