IP Library › Granted Patent US 5,252,842
Granted Patent Utility
US 5,252,842 · App. 07/736,670

Low-loss semiconductor device and backside etching method for manufacturing same

Inventors: Daniel C. Buck, James E. Degenford, Soong H. Lee, Scott Allen Imhoff, Dale E. Dawson
Patented Case View Patent ↗
Granted: Oct 12, 1993 Filed: Jul 26, 1991
Inventors
Daniel C. Buck
James E. Degenford
Soong H. Lee
Scott Allen Imhoff
Dale E. Dawson
Assignee (at issue)
Westinghouse Electric Company LLC

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Quick Facts
Patent No.
US 5,252,842
App. No.
07/736,670
Filed
1991-07-26
Granted
1993-10-12
Kind
A