Granted Patent
Utility
US 5,260,572 · App. 07/929,676
Scanning probe microscope including height plus deflection method and apparatus to achieve both high resolution and high speed scanning
Inventor:
Daniel Richard Marshall
Patented Case
View Patent ↗
Granted: Nov 9, 1993
Filed: Aug 13, 1992
Inventor
Daniel Richard Marshall
Assignee (at issue)
Wyko, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.